主要規格
測試
CS-4 small probe station
Small size, modular design, light weight, up to 6 inch wafer, for I-V/C-V, PIV, optoelectronic tests, applicable to glove box
CL-6 middle-sized probe station
Modular design, precise screw drive structure, up to 8 inch wafer, upgradable for RF test, high current test and laser repair applications.
