Modular design, seamless upgrade, up to 12 inch wafer, high precise screw drive structure, linear movement, quick and fine-tuning lift function for chuck stage, capable for Wafer test, PCB/IC test, RF test, high voltage and current test.
CH-12 |8~12" large-sized comprehensive probe station
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FEATURES / APPLICATION
◆ Up to 12 inch wafer
◆ High precise screw drive structure, linear movement
◆ Compatible with multiple types of microscope
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Specifications
Chuck stage
Model
CH-12
Chuck size
8"/12" upon request
Rotation angle
360°with angle locking, fine-tuning for 15° with 0.1μm resolution
X-Y travel range
8"*8"/12"*12" upon request
X-Y travel resolution
10μm/1μm
Sample holding mode
Vacuum adsorption
Chuck capacity
U shape, up to 10 micropositioners
Stage lift ability
6mm-quick lift /25mm fine tuning
Electrical design
Chuck back is electrical floating, can be used as gate electrode
Dimension
840(L)*600(W)*700mmH/950(L)*700(W)*700mm(H)
Weight
100KG/150KG
Stereo Microscope
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Model |
Single tube microscope /stereo microscope /metalloscope |
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Magnification |
16X-200X/20X-4000X |
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Travel range |
X-Y up to 2"*2", vertical to 50.8mm |
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CCD Camera |
CCD Camera |
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CCD Pixel |
200W Pixel / 500W Pixel /1200W Pixel |
Micropositioner
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X-Y-Z Moving range |
12mm-12mm-12mm |
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Resolution |
10um / 2um / 0.7um/0.5um |
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Adsorption mode |
Magnetic/vacuum |
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Cable |
Coaxial / triaxial |
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Leakage current |
10pA/100fA/10fA upon request |
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Cable connector |
Banana head /Crocodile clip /Coaxial /Triaxial |
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Probe tip diameter |
0.2um/1um/2um/5um/10um/20um upon request |
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Probe metal |
Tungsten/Beryllium copper upon request |
Optional accessories
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Hot chuck |
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Display screen |
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Laser system |
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RF testing accessoriess |
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Shield box |
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Probe card holder |
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Optical platform |
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Gold-plated chuck |
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High voltage test accessories |
Specifications and designs are subject to change without notice.
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All Rights Reserved. Shenzhen Cindbest Technology Co., Ltd |
Shenzhen Cindbest Technology Co., Ltd
Add: 8F Weihuada Industrial Park No.5 Lirong Rd Xinshi Com Dalang St Longhua Dist Shenzhen,China
Tel: 0755-29412885 E-mail: aldrich@cindbest.com； |
