尺寸：427 mm x 427 mm x 216 mm,
自重：27 kg
載重：0-47.7 kg
固有頻率：
垂直：任何載重下，均為0.5 Hz ；
水平：在標準（最大）載重下可達0.5 Hz
測試
CS-4 small probe station
Small size, modular design, light weight, up to 6 inch wafer, for I-V/C-V, PIV, optoelectronic tests, applicable to glove box
CL-6 middle-sized probe station
Modular design, precise screw drive structure, up to 8 inch wafer, upgradable for RF test, high current test and laser repair applications.
