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Use of probe station​
2016-05-135408
Use of probe station

1. Load the sample into the vacuum chuck and turn on the vacuum valve control switch to make the sample securely and firmly adsorbed on the chuck.

2. Use the chuck X-axis / Y-axis control knob to move the chuck platform, and see the sample clearly under the microscope's low magnification objective lens.

3. Use the chuck X-axis / Y-axis control knob to move the chuck platform to move the sample to be tested to the microscope.

4. The microscope is switched to a high-magnification objective, find the point to be measured at a large magnification, and then fine-tune the microscope focus and sample x-y to adjust the image clearly with the measurement point at the center of the microscope's field of view.

5.After confirming the position of the point to be measured, adjust the position of the probe base. After installing the probe, you can first move the probe to the position close to the point to be measured, and then use the three fine adjustments of the probe base XYZ. Knob, slowly move the probe to the measured point. At this time, be careful and slow to prevent the chip from being damaged by excessive movement. When the probe tip is suspended above the measured point, use the Y-axis knob to move the probe first. Move the needle back a little, then use the Z-axis knob to lower the needle, and finally use the X-axis knob to slide left and right to observe if there are any scratches to prove whether they have touched.

6. After ensuring that the needle tip is in good contact with the measured point, you can start the test with the connected test equipment.
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